Abstract
Optical MEMS technology combined with broadband infrared sensor technology is used to realize wavelength-tunable infrared sensors. This paper describes the ongoing research into one such sensor design based on an electrically tunable Fabry-Pérot cavity. Theory, measured results and future research directions are presented and discussed for the single-sensor design currently being developed, in the context of the intended application of this technology; the development of lightweight, portable and robust multi-spectral imaging systems.
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