Optical MEMS (Microspheres and Ring Resonators): Overview of Recent Progress

Abstract

Optical ring or disk resonators can trap traveling optical waves in a closed path, for example, in a waveguide loop or silicon disk cavity. Energy can be added to or extracted from the cavity with the help of waveguide directional couplers. Ring/disk resonators can be fabricated with high quality factor (Q) in diverse material platforms. The high Q of these devices makes them very sensitive to small variations in (i) optical path length (phase), (ii) optical path loss (attenuation), and (iii) coupling coefficient. Any change in the optical path length can cause a shift in the resonance frequency of the ring. Whereas, the change in path loss and coupling coefficient can lead to a change in the Q of the resonator. The micro or nano opto-electro-mechanical systems (MOEMS/NOEMS) provide unique flexibility with a wide change in the tuning parameters. The tuning is obtained by either (i) displacement of the detached parts or (ii) strain in the waveguide/disk. Displacement of a structure detached from the ring/disk closer to the evanescent field can increase the effective refractive index or attenuation. The displacement of a waveguide in the directional coupler altering the gap can change the coupling coefficient. Strain from various sources can lead to refractive index (phase) and absorption changes, in addition to changing the dimensions. Mechanical, electrothermal, piezoelectric, electrostatic, and magnetic actuators have been demonstrated with MOEMS. Mechanical latching has been used to achieve nonvolatile tuning. Multi-beam supported, freestanding, and diaphragm supported structures have shown applications in sensing, optical switching, and energy conversion. MOEMS/NOEMS has recently been shown to provide the desired properties of modern sensors and photonic integrated circuits (PICs) such as low optical power consumption, high resolution, wide tuning range, low complexity, small footprint, low actuator power consumption, and compatibility with standard fabrication technologies. This chapter will start by briefly covering the basics of MOEM tuned ring/disk resonators. Then, the current technology aspects such as tuning mechanism, actuator types, and the fabrication technology will be discussed along with recent innovations. Furthermore, the evolution into NOEMS with specialized applications and materials will be emphasized along with emerging trends.