Optical, mechanical and thermal characterizations of suspended chalcogenide glass microdisk membrane.

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As a promising infrared optical material, the physical characteristics of patterned chalcogenide glass (ChG) membranes are of great importance for the improvement of device performances. In this work, based on the suspended membrane configuration, we have demonstrated the mechanical and thermal characterizations of the Ge11.5As24Se64.5 ChG optical microdisk resonator. By approximation of ChG cantilever configuration, the out-of-plane minimum mechanical strength of the microdisk membrane was measured to be 150 MPa by exploiting atom force microscope (AFM). This value is two orders of magnitude smaller than that of the bulk material, which is beneficial to achieve better mechanical compliance in terms of the ChG membrane sensors. To illustrate the effect of environmental temperature variation on the optical response of the ChG microdisk membrane with quality factor (Q-factor) of 2.87 × 104, the thermal drift was characterized to be 90.2 pm/°C by changing the substrate temperature from 30 °C to 44 °C. The characterization of multi-parameters in combination with the ChG free-standing microdisk prototype is conducive to further expand the potentials of ChG membrane in the ultrasound and other cavity optomechanical sensing.