Abstract
The propagation of guided optical modes and surface acoustic waves in GaN layers grown on sapphire by MOCVD technique is experimentally studied. The effective refractive indices of guided optical modes are measured using the prism coupling technique, and the thickness and refractive indices of the layer are evaluated. The surface acoustic wave velocities are measured by acoustooptic diffraction technique, revealing a strong acoustic dispersion. The evaluation of GaN layer thickness from the SAW measurements is demonstrated.
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