Optical functions of silicon-germanium alloys determined using spectroscopic ellipsometry

Abstract

Abstract The optical functions of silicon-germanium alloys have been determined using two-channel spectroscopic polarization modulation ellipsometry. The optical thickness of the overlayer is determined using the experimental ellipsometry parameters at long wavelengths, thereby increasing the accuracy of the optical functions determined from the data. Extensive tables of the refractive index and extinction coefficient are presented for wavelengths between 240 and 840 nm (5.16 to 1.48 eV), and the results are compared with other results in the literature.