Abstract
A temperature sensor based on the thermo-optics effect of single crystal silicon diaphragm was proposed and studied. The temperature measurement mechanism by using single crystal silicon diaphragm was theoretically analyzed and found the relation between temperature measurement range and the thickness of single crystal diaphragm. It was found that when the temperature changed from 20°C to 48°C, the reflected resonant peak wavelength was shifted which was detected by using the dual-wavelength signal demodulation method. Experimental results for temperature measurement demonstrated reasonable linearity and repeatability, related linear regression coefficient of the experimental result is 99.94%. The study would be of utility value for the design and fabrication of silicon-based sensors which were used to measure pressure or the other physical quantities.
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