Optical Fiber Pressure Sensor Based on Corrugated Diaphragm Structure

Abstract

Aiming at the current pressure monitoring requirement in the energy and chemical industry, combined with the principle of fiber double grating sensing, a fiber optic pressure sensor is designed and developed to meet practical engineering applications. Using corrugated diaphragm pressure sensor structure, the sensor monitoring sensitivity is improved, reducing the monitoring error caused by pressure multi-stage conduction and material expansion and contraction of the traditional diaphragm pressure sensor, and improving the overall stability of the sensor. At the same time, the sensor adopts double grating temperature compensation model, which solves the cross-sensitivity of temperature to pressure measurement and realizes temperature self-compensation of pressure measurement. The experimental results show that the sensor monitoring sensitivity is 0.078 kPa/pm, the monitoring error is \( < \)0.5 kPa, and it has good linearity and long-term reliability. It is especially suitable for pressure monitoring of flammable and explosive environments such as petroleum, coal and chemical industry, and has good application prospects.