Abstract

AbstractWe present the results of systematic studies of optical enhancements by textured Ag/ZnO back reflectors in a-SiGe:H and nc-Si:H solar cells. First, the back reflector materials were characterized by AFM, XRD, and TEM. The results showed that the ZnO layers deposited by sputtering exhibit an increased surface texture with the deposition temperature and film thickness. The material structure showed a strong (002) preferential orientation. The large columnar crystal structure determines the surface texture. Second, the solar cell performance was correlated to the back reflector structure. We found that with a thin ZnO layer, a textured Ag layer results in more light scattering than a flat Ag layer. However, when a thick ZnO layer is used, a flat Ag layer can produce similar or more light scattering than a textured Ag layer. Third, we developed a method to estimate the optical enhancement for a-SiGe:H and nc-Si:H solar cells on various structures of Ag/ZnO back reflectors. Comparing the quantum efficiency data from solar cells made using the same recipe but one on a flat stainless steel substrate and another on a textured Ag/ZnO BR substrate revealed that the optical enhancement for the long wavelength light can be as high as 20 to 30. Compared to the theoretical value of 4n2, there is still scope for further improvement

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