Abstract
This work presents an optical encoder that uses a two-dimensional phase grating. Rather than using a four-windowed scanning grating, this design with a special two-dimensional phase index grating generates two sinusoidal signals that are mutually phase-shifted by 180°. Afterwards, two large-areas, specially structured index grating generates the four 90° electrically phase-shifted scanning signals. The special design of the two-dimensional phase index grating provides more accuracy of phase-shift by using the fact that the + 1 and −1 diffraction orders are intrinsically phase-shifted from one another by 180°. The gap between the phase index grating and mail scale was increased to three quarters of Talbot distance. The tolerance of gap between the index and main grating is 0.1 mm. The tolerance of yaw motion is ± 0.25°.
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