Abstract

An amorphous Al target has been bombarded by 10–20 keV H +, H 3 +, Ar + and Ca + ions and the sputtered neutrals in the excited states were studied by their optical emissions. Spectra were obtained as a function of the incident ion beam energy. Photon yields are projectile and beam-energy dependent. Measured branching ratios of I(308.2 nm) I(309.2 nm) and I(394.4 nm) I(396.2 nm) indicated that the sputtered atoms are in a gas state and are not affected by the Al surface.

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