Abstract
a-C:F:H films were prepared with a mixture of CH 4 and CHF 3 gases by microwave electron cyclotron resonance chemical vapor deposition method. An actinometer optical emission spectroscopy was used to reveal the trend in the concentration of some species (H, F, C 2, CH etc.) as a function of flow ratio R {[CHF 3]/([CHF 3]+[CH 4])}. The results from Fourier transform infrared transmission spectroscopy showed the structural evolution of a-C:F:H films with variable gas flow ratios R. This structural evolution had an influence on the film optical band gap. The optical band gap decreased with the increasing flow ratios R in the polymer-like region, while it increased in the PTFE-like region. The correlation between the C 2 species density and the properties of a-C:F:H films is also discussed.
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