Abstract
Optical emission spectroscopy is used to study the production of active species in nitrogen plasma excited by a 50 Hz pulsed-dc power source. The emission intensities of the band heads of the second positive (λ=337.1 nm; 0–0) and first negative (λ=391.4 nm; 0–0) systems are used to investigate the dependence of their radiative states N2(C 3Π u ) and population density on operating parameters. The emission intensity of the radiative state is used to determine the relative dependence of ion density on operating conditions by considering the fact that, in low-temperature plasmas, the dominant mechanism of the population of ) state starts from the ground state mainly by electron collisions. It is found that the production of these active species has a significant dependence on the discharge parameters and may be optimized under typical operating conditions.
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