Abstract

In this paper we present the results of an optical emission spectroscopic study of an atmospheric pressure microwave (915 MHz) nitrogen and nitrogen with carbon dioxide (1%) plasma at high working gas flow rate. This study was aimed at determining rotational Trot and vibrational Tvib temperatures of N2+ ions and N2, CN molecules. The plasma was generated in a waveguide-supplied cavity-resonant type microwave plasma source. All experimental tests were performed with working gas flow rates QN2 between 80 and 320 l min−1 and a power PA absorbed by the plasma microwave varied from 1.5 to 3 kW. The Trot and Tvib temperatures of selected heavy species were determined by comparing the measured and simulated spectra. The measured temperatures of N2+ ions and N2, CN molecules were 6800 to 7500 K (± 250 K), 5000 to 5200 K (± 150 K) and 6100 to 6600 K (± 100 K), respectively, depending on the PA.

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