Optical emission spectroscopy of fiber laser sustained Xe plasma

Abstract

Laser-sustained plasma (LSP), a unique method of obtaining high brightness broadband light sources, has been used for rapid optical inspection of wafer defects and has thus attracted great interest. Then Xe plasma sustained under high pressure by a continuous fiber laser was investigated using optical emission spectroscopy (OES). Emission spectra of spatial integration diagnosis have shown that with the increase of laser power and the decrease of Gaussian beam focusing number F, the electron temperature fitted by Boltzmann plot method increased from 0.45 eV to 0.85 eV, the corresponding electron density was roughly an order of magnitude of 1016-1017 cm-3, and the calculated absorption coefficient of plasma was distributed in 0.9–1.5 cm-1. To further analyze the spatial distribution of plasma parameters, the spatial resolved OES of LSP was acquired, and the two-dimensional electron temperature and electron density were determined. The non-uniform distribution of the plasma parameters was analyzed due to the existence of thermal gravity convection and forced convection. The serious self-reversal of emission lines of 881.94 nm and 823.16 nm was observed and analyzed.