Optical Emission Spectroscopy in High Target Powder Density Magnetron Source

Abstract

The magnetron dc sputtering of aluminium and titanium targets in an argon atmosphere was performed at high power density up to 300 W/cm 2 . The spectra of emitted light, in visible and near infrared region, were recorded. The neutral argon lines showed the same square root dependence on target current for both target materials. Significant differences in such dependence were observed for metal emitted lines. In the titanium case line intensities tended to saturation.