Optical emission spectroscopy and Langmuir probe studies of an intermediate pressure, supersonic microplasma jet deposition source

Abstract

Optical emission spectroscopy and double Langmuir probe studies were conducted on the supersonic expansion plume of a flow-through, intermediate pressure (∼10 Torr) Ar/N2 microplasma source used for material deposition. Emission from the first positive system of N2 (B3Πg → A3Σu+) was used to determine the expanding gas rotational and vibrational temperatures; both were strongly dependent on plasma drive current, and the gas (rotational) temperature could be tuned from 300 to 800 K. The effects of drive current, plasma circuit configuration, and O2 addition to the gas feed on the local electron temperature (Te) were investigated using a miniature double Langmuir probe. Electron temperatures of 1–2 eV were estimated and decreased slightly with higher O2 content in the feed and increased distance from the capillary orifice. Te dependence on drive current was more complicated, falling into two regimes, namely, a nonuniform “predischarge” regime at low currents (<12 mA) where Te varied greatly, and the normal hollow cathode regime at higher currents (>12 mA) where Te remained nearly constant as plasma current was increased. These phenomena are discussed in light of the IV characteristics of the discharge drive circuit.