Abstract
Reliability of electron temperature and density diagnostics by an optical emission spectroscopy and a collisional radiative modeling is investigated by being compared with a Langmuir probe diagnostics for capacitively-coupled and inductively-coupled Ar plasmas in the ranges of electron temperature 1.2–2.2 eV and density 4.0×109−8.0×1011cm−3. Particular attention has been paid to radiation trapping and electron energy distribution function (EEDF) regarding the modeling. It is found that the two-temperature EEDF model gives better agreement of electron temperature diagnostics with the Langmuir probe measurement for non-Maxwellian plasma. The radiation trapping with an escape factor for finite size cylinder geometry reduces the discrepancy between the modeled and measured spectral line intensities compared to an escape factor for plane parallel geometry, specially for the optically thick 811.5 nm transition to the metastable level whose population depends on the diffusion rate.
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