Abstract
In the radio-frequency (rf) glow discharge plasma of a flowing mixture of silane and argon, the intensities of the peaks at 414.2 and 750.4 nm, arising due to SiH (A2Δ–X2Π) and Ar [4p′(1/2)0–s′(1/2)0] transitions, respectively, have been studied by optical emission spectroscopy with the argon dilution level and the rf power density as the variable parameters. The experimental points have been satisfactorily fitted with the densities of metastable argon and the excited silane, obtained from the kinetics of reactions going on in the plasma.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
