Optical diffraction simulation of a digital micromirror device

Abstract

We present a 3D electromagnetic simulation of a digital micromirror device (DMD) from 0.4 µm to 5 µm, which accurately models DMD reflectance and contrast ratio, including the effects of diffraction. A DMD is a spatial light modulator with a wide range of applications, including projection displays, 3D printing, and imaging spectroscopy. The physical structure of the DMD induces strong wavelength-dependent diffraction effects that impact the stray light, optical throughput, and pupil illumination distribution of a system. To quantify this, we perform a 3-dimensional electromagnetic finite-difference time-domain simulation, illuminating the DMD with a focused, incoherent beam, explicitly calculating the near-field electric fields, and calculating the far-field distribution of light. The far-field data determines diffraction efficiency and the distribution of light across the pupil. With these models, we are able to study the DMD’s optical efficiency in three key regimes: the specular regime, where the DMD behaves like a segmented mirror with a diffractive component (λ < 1 µm); the diffraction-dominated regime, which is also described by analytic diffraction grating theory (3 µm < λ < 5 µm); and, uniquely, the transition region, where the specular reflection and diffraction contributions are comparable (1 µm < λ < 3 µm). Our results inform system performance parameters, provide optical design constraints, and create a framework of use cases for DMDs.