Abstract

Diaphragms are one of the most widely used and suitable mechanical structures for use as a pressure sensing element. Pressure applied to one (or both) side(s) of the diaphragm will cause it to deflect until the elastic force balances the pressure; this induces stress along the diaphragm's length. Our presented device monitors this stress using planar Bragg gratings. Similar pressure diaphragm sensors have been reported using embedded fibre Bragg gratings but these do not offer the advantages of monolithic integration and fabrication.

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