Abstract
This paper is devoted to the investigation of low-pressure high-current impulse diffuse discharge (HCIDD), which is a specific quasi-stationary form of a pulsed magnetron discharge. The high-speed gated camera imaging and optical emission spectroscopy results are reported. Four distinct discharge forms were observed: high-current impulse magnetron discharge, HCIDD, columnar impulse diffuse discharge and cathodic spot arc. The magnetic probes arranged along axial and radial directions were used to study the behaviour of magnetic field fluctuations. The characteristic oscillations of the magnetic flux density occur in HCIDD and columnar diffuse discharge. Their frequencies range from 0.4 to 2 MHz depending on the magnetic field configuration.
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