Abstract
We developed a new optical detection method for defects in multilayered optical devices. An optical detection is achieved by sensing the scattering twinkle points of guided light in a multilayered optical device and by analyzing the scattering properties of the twinkle points. We found a difference in scattering property between defective points and nondefective points, and developed a check system for the scattering direction from a scattering twinkle point. By this optical defect detection method, we realize a decrease in defect detection error.
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