Abstract
AbstractThis letter presents a novel MEMS‐based multifunction‐integrated optical device capable of performing as variable optical power splitter (VOPS), optical switch (OS), and variable optical attenuator (VOA). The device manipulates the light with a binary‐slope mirror driven by compound electrostatic actuator. The optical models for splitting and attenuating are investigated, respectively. Ball‐lensed fibers are assembled with the device to achieve high coupling efficiency in this work. Measurements reveal that the excess loss of the device is less than 3 dB, and the controllable attenuation range is up to 39 dB. Moreover, polarization‐dependent loss is less than 0.7 dB. © 2008 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 2185–2189, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23603
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