Optical constants of silicon nanoparticle thin films grown by laser electrodispersion

Abstract

The study of films consisting of amorphous close-packed silicon nanoparticles grown by laser electrodispersion is continued. The optical transmission and reflection spectra of films fabricated in vacuum and at various pressures of oxygen introduced into the chamber to passivate the nanoparticle surface are measured. The spectra of the refractive index and extinction coefficient are calculated. The shape of the spectra of the optical constants correlates with that of the spectra of bulk amorphous silicon; however, the values obtained differ from the parameters of bulk amorphous silicon. The differences are caused by the significant volume of voids between nanoparticles and a large number of dangling bonds (defects) on the nanoparticle surface. The optical constants decrease with increasing oxygen content in the films, which is indicative of the passivation of dangling bonds by oxygen.