Abstract

In this work, gadolinium oxide (Gd2O3) films were obtained by the vacuum evaporation method. Films were tested by x-ray diffraction and energy dispersive x-ray fluorescence analysis. The attenuation of x-rays through the sample, and the absorption-corrected x-ray fluorescence yield, was utilized for quantitative analysis. Films of around 180 nm thick were shown to be amorphous, even after annealing. The new optical constant data, n and k, of Gd2O3 oxide films before and after homogenous annealing as a function of wavelength (300-700 nm) were determined from spectrophotometric measurements of transmittance.

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