Abstract
The high-power laser system has brought an interesting challenge to the development of optical coatings. A wide variety of coating specifications that are often contradictory have to be fulfilled. The choices of deposition process as well as coating materials are critical to coating loss, damage threshold, long-term stability, and other optical properties. A number of optical coatings being newly applied to deuterium fluoride laser systems are presented. The 3.8-mum laser reflection coatings with high damage threshold, multichromatic beam splitters, antireflection coatings with widely separated dual-wavelength bands, and 0.55-14-mum wide-band reflective coatings have been developed on substrates such as Si, Mo, fused silica, chemical vapor deposition ZnSe. Superior results have been obtained with ion-assisted deposition and electron-beam evaporation. Approaches to coating design and practical aspects of coating development are also discussed.
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