Optical characterization of low-absorbing thin films in the visible and infrared spectrum

Abstract

The optical characterization of thin films is a field of continuous investigation, nevertheless there is a lack of data of refractive indexes (n-ik) in the infrared spectrum. In this paper a method for the determination of the optical parameters n and k is described that starting from spectrophotometric measurements gives, by computer, the refractive index profile in a wide wavelength range. Y203, Al203, HfO2, ZnSe and ZnS are the examined film materials and their n and k values in the visible and infrared spectrum (0.35-20 m) are reported.