Abstract
AbstractThis work introduces a new interference technique for the diagnostic characterization of hydrogenated silicon thin films. The interference technique is based on new self-consistent data analysis algorithms for simultaneous optical transmission and specular reflection using exact interference equations for the system of a film on a substrate. It provides a quick non-destructive optical measurement of absorption coefficient and refractive index spectra of amorphous silicon (a-Si:H) and polycrystalline silicon (poly-Si:H) thin films in a wide range of the incident photon energies (0.5–3.5 eV). This non-contacting, high sensitivity method is a powerful probe of various material properties including thickness, refractive index and absorption spectra, hydrogen content, alloy fraction, energies of localized defect states and their concentrations. Experimental results for optical study of hydrogenated Si films indicate that the proposed method makes possible high precision measurements of the absorption in the region near the fundamental edge. In this region the absorption coefficient varies over several orders of magnitude. Also, the absorption related to impurities and defects in the subgap energy region at least from 102 cm−1 can be detected. As a result, the interference technique shows promise in providing feedback for monitoring film growth and device fabrication processes.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.