Abstract
Gallium nitride (GaN) films deposited on sapphire substrates by metal organic chemical vapor deposition were successfully transformed into bulk and nanoporous gallium oxide (Ga2O3) using a wet thermal oxidation technique. Oxidation depth measurements confirmed that the oxide growth appeared to be faster in the case of nanoporous GaN than that of bulk GaN. Spectroscopic ellipsometry was used to evaluate and compare the optical properties of nanoporous and bulk Ga2O3 films, such as refractive index and extinction coefficient, which revealed improved optical properties for nanoporous Ga2O3 compared to the bulk. The simulations conducted on the ellipsometric spectra for bulk and nanoporous Ga2O3 using the Forouhi-Bloomer model and the Bruggeman effective medium approximation revealed the best fit with a low mean square error value. In the case of nanoporous Ga2O3, zero absorption was observed in the wavelength range of 300 nm to 840 nm, supporting the use of this material as a transparent coating in optoelectronic devices.
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