Abstract

We discuss the solutions of the inverse problem of multiangle ellipsometry for titanium with a natural surface layer, namely, the determination of the thickness of the near-surface layer and optical characteristics by use of which one can interpret the titanium structure. It turned out that the studied samples of pure polycrystalline titanium have a rather thick inhomogeneous layer of polycrystalline titanium with oxygen and, on this layer, there is a surface layer similar to titanium oxide. The data on the optical characteristics of pure polycrystalline titanium agree well with those determined earlier by other optical methods.

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