Abstract
The emission characteristics of a transverse volume discharge in a He: HCl = 10: 1 mixture at a total pressure of 1–8 kPa were investigated. The plasma volume was 18 × 2.2 × 1 cm3, the interelectrode distance was d=2.2 cm, and the charging voltage of the main storage capacitor was 5–10 kV. The emission characteristics of the discharge were studied in the spectral range of 500–1000 nm. This type of discharge can be used in pulsed dry-etching plasmochemical reactors. The density of atomic chlorine radicals in the plasma was optimized in terms of the pressure of the initial working He-HCl mixture by measuring the relative radiation intensity of the Cl 837(5)-nm spectral line. The density of molecular radicals can be monitored indirectly by recording radiation from the excited chlorine-free decomposition products of HCl molecules (the Hα 656-nm line).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
