Abstract
Cylindrical magnetron sputtered TiN thin films have been grown on glass (G) and quartz (Q) substrates to examine optical properties under two flow conditions: increasing nitrogen flow rate (1 → 35 sccm): (I) and decreasing nitrogen flow rate (35 → 1 sccm): (D). The optical properties of the film are characterized using UV–Vis-NiR spectroscopy, spectroscopic ellipsometry, and photoluminescence studies. Films deposited under both parameters exhibited excellent UV-restriction properties. Nano-hilled topography of the film contributed to multiple reflections and scattering of incident light on both quartz and glass specimens. Clustering of nano-particles in G(D) specimen increases the light interaction and absorption within the film leading to higher absorbance and lower transmittance properties compared to G(I). TiN-Quartz specimen displayed better UV absorbing properties compared to TiN-Glass as confirmed through ellipsometry studies. lack of phonon-related transitions in Tauc's plot indicated the involvement of direct allowed transitions.
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