Abstract

(Ba0.5Sr0.5)Nb2O6 films were synthesized on a Pt(111)/Si(001) substrate by RF gas-discharge sputtering in pure oxygen atmosphere. It was found that the films have a dominant crystallographic orientation in the [001] direction and natural unipolarity, which was revealed through analysis of dielectric and piezoelectric parameters. It was demonstrated that the optical parameters of film material in the Ba0.5Sr0.5, Nb2O6/Pt(111)/Si(001) heterostructure match those typical for a (Ba0.5Sr0.5)Nb2O6 single crystal.

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