Optical and structural characterization of one-dimensional porous silicon photonic crystals made in single and double electrochemical cells: Study on the back contact effect

Abstract

One-dimensional porous silicon photonic crystals with microcavity were fabricated using single and double electrochemical cells and the same electrochemical parameters. Devices with better optical quality can be achieved when liquid acids are used as back contacts for current flow. Optical analysis of them shows that devices with less rough interfaces and layers with negligible in-depth inhomogeneities are formed. However, the etch rate and porosity depend strongly on the acid strength, the diffusion of the acid species from the liquid bulk to the interface, and the anodization temperature. Strong acids promote a higher etch rate. Thinner films with lower porosity and rougher interfaces are observed for devices fabricated in substrates with aluminum or platinum as solid ohmic contacts compared to devices fabricated in unmetallized substrates, as shown by optical analysis, such that devices with aluminum as the ohmic contact have about 80% of the reflectance, while with platinum shows 94%.