Abstract

We discuss a range of issues related to optimization of industrial production processes used for deposition of metal fluoride and metal oxide films on optical components. We determine the optical and performance properties of films produced for commercially manufactured equipment via high-vacuum evaporation. We find that substrate temperature, vacuum chamber residual pressure, vacuum chamber working pressure, and ion source operating mode have an effect on these characteristics.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.