Optical and Nanomechanical Properties of C Coated BN Thin Film Deposited by Thermionic Vacuum Arc Technique

Abstract

Boron nitride is an artificial wide band gap material. It is very hard in cubic form (cBN) as well as diamond, and it is very soft in hexagonal form (hBN). In this paper, the optical and nano-mechanical properties of carbon coated boron nitride nano sheets (C-BNNSs) thin films were deposited onto copper (Cu), stainless steel (SS), Ti6Al4V substrates. The band gap of C-BNNSs thin film was determined as 3.61 eV. Mean grain heights of the film were approximately 400 nm, 100 nm and 105 nm for the film deposited onto Cu, SS and Ti6Al4V substrate, respectively. Cubic phase rates of BN were calculated approximately 34%. Roughness (Ra) of the films are approximately the same and its value was approximately 20 nm. Hardness of the films were 20 GPa at 20 nm depth. According to results, C-BNNSs material is proper for the semiconductor and optoelectronic applications.