Optical and mechanical design of a “zipper” photonic crystal optomechanical cavity

Abstract

Design of a doubly-clamped beam structure capable of localizing mechanical and optical energy at the nanoscale is presented. The optical design is based upon photonic crystal concepts in which patterning of a nanoscale-cross-section beam can result in strong optical localization to an effective optical mode volume of 0.2 cubic wavelengths ( (lambdac)(3)). By placing two identical nanobeams within the near field of each other, strong optomechanical coupling can be realized for differential motion between the beams. Current designs for thin film silicon nitride beams at a wavelength of lambda?= 1.5 microm indicate that such structures can simultaneously realize an optical Q-factor of 7x10(6), motional mass m(u) approximately 40 picograms, mechanical mode frequency Omega(M)/2pi approximately 170 MHz, and an optomechanical coupling factor (g(OM) identical with domega(c)/dx = omega(c)/L(OM)) with effective length L(OM) approximately lambda= 1.5 microm.