Optical and electrophysical properties of nitride TiAlSiN and carbonitride TiAlSiCN coatings: influence of reactive magnetron deposition regimes

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The development of thin-film thermal control coatings for small spacecraft is relevant. Coatings based on titanium nitride are capable of functioning in unfavorable conditions of near and deep space, due to their high resistance to the irradiation by high-energy particles. Using the reactive magnetron sputtering method, the nanostructured TiAlSiN and TiAlSiCN coatings were formed on the substrates of silicon oxide (SiO2), glass-ceramic CT-1 and single-crystalline silicon (Si(100)). A study of the electrophysical and optical properties of the formed coatings was carried out. The deposited coatings demonstrate a good reflectivity in the infrared range of spectrum (700–2000 nm), what is important for reducing the overheating of the spacecraft (SC) under the influence of the direct sunlight. In the visible range of spectrum (400–700 nm), a low level of total Rtotal reflection is observed. This is promising for satellites designed to observe the Earth’s surface. The values of solar absorption coefficients αs, emissivity coefficients ε0, ratios αs/ε0, as well as the equilibrium temperature Tр for the samples under study were obtained. The values of resistivity ρ and surface resistance R□, electron concentration N and electron mobility μ were determined. It has been discovered that TiAlSiN, TiAlSiCN films are electrically conductive: ρTiAlSiN = (92÷4260) ∙ 10–7 Ω ∙ m, ρTiAlSiCN = (51÷2360) ∙ 10–7 Ω ∙ m. It has been found that adding carbon to the coating composition reduces the resistance. The obtained nanostructured coatings of TiAlSiN nitride and TiAlSiCN carbonitride can be used as temperature control coatings for small spacecrafts.