Abstract
Modern semiconductor devices have revolutionized wide-ranging technologies such as electronics, lighting, solar energy, and communication [1]. The semiconductor industry employs Si to fabricate electronic circuits, and GaAs, GaN, and other III–V materials for optoelectronics [2], with typical substrates consisting of wafers manufactured at high temperature. Precisely controlled thin films can be deposited on the substrate to achieve additional functionality, for example by chemical vapor deposition (CVD) or molecular beam epitaxy [3].
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