Optical and Electrical Si-Based Biosensors: Fabrication and Trasduction Issues

Abstract

In this work we discussed feasibility studies and examples of biological molecules integration in Si-based miniaturized devices. We investigated three main issues: (i) device surface functionalization, (ii) biological molecule functionality after immobilization and (iii) biosensor working principle using both electrical and optical transduction mechanisms. In the first case the idea is to fabricate electrolyte-insulator-semiconductor (EIS) and, in the near future, ion-sensitive field effect transistor (ISFET) biosensors. The electrical characterization of MOS-like capacitors with ssDNA anchored on the SiO2 dielectric, allowed us to conclude that the structures tested are sensitive to DNA immobilization and hybridization, as demonstrated by a positive shift in the flat band voltage after ssDNA immobilization and by a further shift after prefect match hybridization. The optical transduction mechanism, using an approach closer to commercial devices (e.g. DNA-chip) is based on the use of pixelated solid state photon-detectors (Silicon Photomultipliers, SiPM). We showed this new device can be used to replace traditional optical detector in DNA-chip applications and allows designing new optical detection systems based on photon counting operation.