Abstract
ZnO thin films were deposited by DC reactive magnetron sputtering using a metal zinc target. The crystallinity microstructure and surface morphology of ZnO thin films were investigated by X- ray diffraction (XRD) and scanning electron microscopy (SEM). The composition of ZnO thin film was characterized by XPS. The optical properties of ZnO thin film were obtained by spectroscopy ellipsometry and UV-VIS spectrometry. The optical bandgap was found to be 3.29eV of direct-transition type. The low frequency (1kHz- 100kHz) dielectric properties of ZnO thin film were also discussed. The dielectric constant and dielectric loss at 10kHz are 13.4 and 0.03 respectively.
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