Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation

Abstract

Diamond-like carbon (DLC) films are prepared by a bipolar-type plasma-based ion implantation (PBII) technique using toluene and nitrogen gases (N2), and the optical and electrical properties are examined as a function of N2 flow rate. The N concentration in the films and structural changes are also examined by Rutherford backscattering spectrometry (RBS), atomic force microscopy (AFM), and Raman spectroscopy. It is found that the deposition rate decreases, but N concentration linearly increases with increasing N2 flow rate. Granular surfaces are observed and the grains decreases in size as N2 flow rate increases. In addition, Raman analysis suggests that aromatic ring clusters and the amorphous structure increase in amount. The optical band gap and conductivity increase with increasing N concentration up to about 11 at. %, and then decrease with further increase in N concentration.