Abstract
This study focuses on characterizing graphene oxide-doped AZO (Al2O3:ZnO) nanocomposite thin films deposited on glass substrates using the thermionic vacuum arc (TVA) deposition technique. We investigated the effects of annealing at 200 °C for 10 min on the electrical, optical, and surface properties of these films. In particular, the surface roughness measured by AFM decreased from 6 nm to 4 nm after annealing. FESEM analysis revealed symmetrical surface features after the treatment. Furthermore, the Tauc Method extrapolation highlighted deviations in the energy gap values before and after annealing, indicating changes in the optical properties and electronic structure. The electrical resistivity decreased significantly from 14 MOhm to 5 MOhm, while the optical transmittance in the 400–700 nm range increased from 36.45 % to 41.24 %. This research highlights the potential of TVA as a valuable technique for creating high-functional materials suitable for nanotechnology applications and confirms the trends observed in the last 10 years of research and development work in this field.
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