Optical actuation of microelectromechanical systems using photoelectrowetting

Abstract

We demonstrate a proof-of-concept that microelectromechanical systems (MEMS) can be optically actuated using photoelectrowetting. A 30 µm thick aluminium cantilever is actuated using an ordinary white light source via the modulation of capillary forces in a liquid bridge on a Teflon® coated commercial silicon wafer. A deflection of 58 µm is observed using a light power of 100 mW at a bias of 7 V. The deflection of the cantilever relies on the photoelectrowetting effect [S. Arscott, Sci. Rep. 1, 184 (2011)]. Such wireless actuation could be useful for optical addressing and control of autonomous wireless sensors, MEMS, and microsystems.