Abstract
In this article a new approach is considered for implementing operator splitting methods for transport problems, influenced by electric fields. Our motivation came to model PE-CVD (plasma-enhanced chemical vapor deposition) processes, means the flow of species to a gas-phase, which are influenced by an electric field. Such a field we can model by wave equations. The main contributions are to improve the standard discretization schemes of each part of the coupling equation. So we discuss an improvement with implicit Runge- Kutta methods instead of the Yee’s algorithm. Further we balance the solver method between the Maxwell and Transport equation.
Highlights
In this article a new approach is considered for implementing operator splitting methods for transport problems, influenced by electric fields
Our motivation came to model PE-CVD processes, means the flow of species to a gas-phase, which are influenced by an electric field
We motivate our study by simulating thin film deposition processes that can be realized by PE-CVD processes, see [1,2]
Summary
We motivate our study by simulating thin film deposition processes that can be realized by PE-CVD (plasma enhanced chemical vapor deposition) processes, see [1,2]. We concentrate on the numerical modeling and simulation of electrical fields, which are coupled with transport equations. The method has its origin in the field of propagation of electromagnetic beams in atmosphere, where the multi-physics modeling was done on the assumption that “the continuous gain medium may be approximated by a series of gain sheets with free propagation between the sheets” [8,9]. As it will be shown later on, this method is a Strang-Marchuk operator splitting method [10,11]. At the end of this paper we introduce future works
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
