Abstract
The operation of multi-finger graphene quantum capacitance varactors fabricated using a planarized local bottom gate electrode, HfO2 gate dielectric, and large-area graphene is described. As a function of the gate bias, the devices show a room-temperature capacitance tuning range of 1.22–1 over a voltage range of ±2 V. An excellent theoretical fit of the temperature-dependent capacitance-voltage characteristics is obtained when random potential fluctuations with standard deviation of 65 mV are included. The results represent a first step in realizing graphene quantum capacitance varactors for wireless sensing applications.
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