Abstract
Presents the first report of successful electrical operation of electrostatic micromotors in liquid environments. Surface-micromachined polysilicon harmonic (wobble) side-drive micromotors with flange and center-pin bearing designs are studied. Micromotor operation in four liquid environments including acetone, methanol, deionized (DI) water, and silicone lubricating oil is investigated. Of these liquids, we have successfully achieved electrical operation of flange and center-pin bearing micromotors in DI water and silicone lubricating oil.
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