Operation of a magnetron sputtering gas aggregation cluster source in a plasma jet regime for synthesis of core–shell nanoparticles

Abstract

Operation of a magnetron sputtering gas aggregation cluster source in a plasma jet regime is presented. In specific experimental conditions, the plasma extends from the inside of the cluster source in the deposition chamber as a plasma jet, transporting also the nanoparticles (NPs) produced in the cluster source. The chemistry of the NP surface is modified in-flight by injecting a chemical precursor in the plasma jet, resulting in core–shell NPs. Also, the plasma jet presents a low gas temperature, safely interacting with materials sensitive to thermal degradation (like polymers). These findings prove the potential of the presented plasma jet for applications in nanotechnology.