On-state and off-state breakdown in GaInAs/InP composite-channel HEMT's with variable GaInAs channel thickness

Abstract

Short-channel Ga/sub 0.47/In/sub 0.53/As high electron mobility transistors (HEMTs) suffer from low breakdown voltages due to enhanced impact-ionization effects in the narrow bandgap channel. This could limit the application of single-channel devices to medium power millimeter-wave systems. A composite Ga/sub 0.47/In/sub 0.53/As/InP channel, which exploits the high electron mobility of Ga/sub 0.47/In/sub 0.53/As at low electric fields, and the low impact-ionization and high electron saturation velocity of InP at high electric fields can overcome this limitation. In this paper we study on-state and off-state breakdown of Ga/sub 0.47/In/sub 0.53/As/InP composite-channel HEMT's with a variable GaInAs channel thickness of 30, 50, and 100 /spl Aring/. Reduction of channel thickness leads to the improvement of both on-state and off-state breakdown voltages. In on-state conditions, the enhancement in the effective Ga/sub 0.47/In/sub 0.53/As channel bandgap that takes place when the channel thickness is reduced to the order of the de Broglie wavelength (channel quantization) effectively enhances the threshold energy for impact-ionization, which is further reduced by real space transfer of electrons from the Ga/sub 0.47/In/sub 0.53/As into the wider bandgap InP. Channel thickness reduction also causes a decrease in the sheet carrier concentration in the extrinsic gate-drain region and therefore, a reduction of the electric field beneath the gate. This, together with the adoption of an Al/sub 0.6/In/sub 0.4/As Schottky layer (increasing the gate Schottky barrier height), leads to excellent values of the gate-drain breakdown voltage. In conclusion, composite channel InAlAs/GaInAs/InP HEMTs, thanks to the combined effect of effective band-gap increase, enhanced real space transfer into InP, and sheet carrier density reduction, allow a good trade-off between current driving capability and both on-state and off-state breakdown voltage.