Abstract
Online in situ monitoring of the gas-discharge deposition of lead zirconate titanate Pb(ZrxTi1 − x)O3 (PZT) films onto a stainless steel substrate revealed oscillatory decay in the intensity of light with a wavelength of 0.640 μm specular reflected from the growing film. It is established that the parameters of the reflectance curves depend on the electric power deposited in discharge and correlate with the type of growing films (possessing pyrochlore or perovskite structures). Using the proposed method, it is possible to control technological parameters of the deposition process, which determine the physical characteristics of the obtained PZT films.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
